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1402 ION GUN: Low Energy Performance
The Nonsequitur Technologies Model 1402 Ion Gun features high beam currents at very low beam energies. It also may be operated at high beam energies (up to 3keV) to provide additional depth profiling and sample cleaning capability. Likely applications would include charge compensation, ion scattering, and studies of ion/solid interactions. Ion generation is by means of electron impact ionization with dual filaments for long source life without having to break system .vacuum The filaments are located off axis to prevent line of sight deposition of the filament material onto the sample. Design Features
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