nti
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Model 1403C

1403C ION GUN:  Cesium/Alkali Ions

Model 1403C Ion Gun

Design Features

  • User replaceable frit ion source allowing production of various ion species
  • Adjustable spot size from 75um to >1mm for spatially defined sputtering
  • Continuous variable beam energy up to 5keV
  • Continuously variable beam energy up to 5keV
  • Neutral species suppression using beam bending optics
  • Beam blanking capability for TOF SIMS
  • Integral beam current monitoring capability
  • Option beam bunching electrode
  • All UHV compatible and etch resistant materials used in fabrication
  • Pre-objective lens deflection for reduced spot size
  • Differential pumping to minimize main chamber gas loading

Guaranteed Performance @ 5.0 keV Cs Ions, 35mm W.D.

Mode
Spot Size
(µm)
Beam Current(nA)
Current Density
(mA/cm2)
Large Spot
125
400

Small Spot
75
100