Design Features

• High Brightness electron impact ion source
  
• Continuously variable beam energy up to 3kV
  
• 0-10uA Beam Current
  
• All Noble gases plus Nitrogen. Optional Oxygen capability with Thoria Coated Iridium Filaments
  
• All UHV compatible and etch resistant materials used in fabrication
  
• Condenser lens for variable etch area and beam collimation
  
• USB interface and graphical user interface for computer control