nti
Phone: 541-312-2410
Fax: 541-312-2412
Email Address:
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Model 1403

m1403 Ion Gun

Design Features

  • High brightness electron impact source for maximum bulk material removal
  • Emission regulated bombardment provides stable ion current with front panel adjustable dynamic range x300
  • Adjustable spot size from 20 µm to > 1 mm for spatially defined sputtering
  • Continuously variable beam energy up to 5keV
  • Neutral species suppression using beam bending optics
  • Beam blanking capability for TOF SIMS
  • Integral beam current monitoring capability
  • Replaceable beam trimming aperture with typical life-time of  > 500 hours
  • Dual filaments provide operational backup with typical filament life-time > 500 hours
  • Internal source pressure sensor permits monitoring of ion source pressure
  • All UHV compatible and etch resistant materials used in fabrication
  • Pre-objective lens deflection for reduced spot size
  • Differential pumping to minimize main chamber gas loading
  • Operates over the range of inert gas species

Guaranteed Performance @ 5.0 keV Ar Ions

Mode
Spot Size
(µm)
Beam Current
Current Density
(mA/cm2)
Large Spot
250
15µA
30
Small Spot
20
300µA
95






System Integration Details
System Integration for the Model 1403



Model 1403A Controller
    The specifications for the power supply/controller of the 1403 can be found on this page .



Typical Performance Data
    The graphs and specifications for the Model 1403 Ion Gun when working under typical conditions can be found here .



 Datasheet for Model 1403
Microsoft Word Format
Portable Document Format