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Model 1403





Guaranteed Performance @ 5.0 keV Ar Ions

Mode
 Spot Size
(µm)
 Beam Current
 Current Density
(mA/cm2)
Large Spot
 250
 15uA
 30
Small Spot
 20
 300uA
 95

    For these guaranteed values, here are the specifications and graphs related to those runs.


Engineering Specifications

Working Distance

35 mm
Neutral Species Suppression

3° Electrostatic bend optics
Beam Energy

≤ 5 keV continuously variable
Raster Size

4 x 4 mm (minimum)
Mounting Flange

70 mm (4.5 in) O.D. C.F.
Differential Pumping

70 mm (2.75 in) O.D. C.F.
Supply Gas Inlet

34 mm (1.33 in) O.D. C.F
Source Gases

He, Ne, Ar, Kr, Xe
Bake-out Temperature
150° C maximum


Objective Focus Voltage vs. Working Distance
 Variation of front panel focus potentiometer to produce optimum beam
focus for different working distances. The two curves represent the large
spot (high current) and small spot (low current) modes of operation.


Current Intensity Profile - 300nA
Beam intensity profile in small spot mode at 300nA, 5keV Ar ions.
The Faraday cup used for these measurements had pinhole diameter ≈ 10µm.


Current Intensity Profile - 16uA
Beam intensity profile in large spot mode at 16µA, 5keV Ar ions.
Faraday cup pinhole diameter ≈ 10µm.


Time Stability of Current
Ion beam current stability with time using a standard leak valve for
gas feed. Stability over the period was <0.3%. Measurements were
repeated every 10 seconds over a period of 30 minutes.


Beam Current Pressure Response
Variation of beam current with Ar gas flow rate to the ion source.
The gas flow is  monitored in the main chamber.


Beam Banking
Change in ion beam current as a result of applying a beam banking voltage.